REFERENCE ELECTRODE OF PH METER AND FABRICATING METHOD THEREOF

摘要

PURPOSE: A reference electrode of pH meter and a fabricating method thereof are provided to fabricate stably an electrode by forming a titanium/molybdenum before an etching process and by etching a space therebetween. CONSTITUTION: A molybdenum layer is formed on a predetermined portion of a surface of a silicon wafer by using a depositing process. A titanium layer is formed on a surface of the molybdenum layer by performing the depositing process. A cavity is formed by using an etch solution on a predetermined portion of an outer circumference formed with the titanium/molybdenum layer. A potassium chloride(KCl) is charged into the cavity. A sealing process for an edge portion of a neighboring titanium/molybdenium layers and the potassium chloride(KCl) is performed.