METHOD FOR INSPECTING DEFECT WITH AUTOMATIC DEFECT TESTER

摘要

PURPOSE: An automatic defect inspection apparatus and an inspection method therewith are provided to cut down inspection expenses and to reduce working hours by examining defectiveness accurately regardless of changes of image luminosity. CONSTITUTION: An object is illuminated with a lighting unit, and image of the object is obtained with receiving rays reflected from the object by a photograph unit(S310). The image is transmitted from a measuring optical system to an image analyzing system. The average luminosity of the image is calculated with the image analyzing system(S320), and compared with the reference value(S330). The object is inspected in case of the measured luminosity to be equal to the reference value(S350). A normal range and a defective range are adjusted in case of the measured luminosity not to be equal to the reference value(S340), and objects are sorted based on the adjusted defective range. Defectiveness is inspected accurately with adjusting the normal range and the defective range according to changes of image luminosity.