FOUP TRANSFER APPARATUS OF FOUP OPENER

摘要

PURPOSE: A foup transfer apparatus of a foup opener is to stably provide a horizontal state and a locking state from when the foup is settled to when the foup is transferred, by solidly performing a lock operation of a locker on a transfer table and by eliminating a disturbance condition when the foup is settled. CONSTITUTION: A foup transfer table(100) is installed on a bedplate(200), capable of transferring. The locker(130) capable of rotating is installed in a concave entrance part of the front surface of the transfer table to temporarily fix the lower surface of the foup installed on the transfer table. A drive unit drives the locker.