发明名称 STRUCTURES AND METHODS FOR IMPROVED CAPACITOR CELLS
摘要 Systems, devices, structures, and methods are described that inhibit atomic migration that creates an open contact between a metallization layer and a conductive layer of a semiconductor structure. A layer (130) of an inhibiting substance may be used to inhibit a net flow of atoms so as to maintain conductivity between the metallization layer (140) and the conductive layer of the semiconductor structure (128). Such layer of inhibiting substance acts even with the presence of point defects for a given temperature.
申请公布号 WO0159850(A3) 申请公布日期 2002.03.07
申请号 WO2001US03992 申请日期 2001.02.07
申请人 MICRON TECHNOLOGY, INC. 发明人 AGARWAL, VISHNU, K.
分类号 H01L21/02;H01L21/768;H01L21/8242;H01L29/92;(IPC1-7):H01L29/92 主分类号 H01L21/02
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