发明名称 Halbleiterchip und Verfahren zu dessen Herstellung
摘要 The invention relates to the production of semiconductor chips with thin layer technology. An active layer (2) is grown on a substrate, with contact layers on the rear face thereof, comprising a base layer (3), reinforced by a reinforcing layer (4) the total thickness of which is at least as thick as the active layer (2). Finally an auxiliary support layer (5) is produced, which permits the further processing of the active layer (2). The reinforcing layer (4) and the auxiliary support layer (5) replace the mechanical support used in conventional methods.
申请公布号 DE10040448(A1) 申请公布日期 2002.03.07
申请号 DE20001040448 申请日期 2000.08.18
申请人 OSRAM OPTO SEMICONDUCTORS GMBH & CO. OHG 发明人 ILLEK, STEFAN
分类号 H01L33/00;H01L33/38;(IPC1-7):H01L33/00;H01S5/02 主分类号 H01L33/00
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