Electronic device for a wafer container, wafer manufacturing system, and method

摘要

A wafer container (200) carries a semiconductor wafer (201) between first (110) and second (120) stations to apply first and second processes, respectively, to the wafer. An electronic device (205) attached to the container comprises a receiver unit (210) to receive first data (111) indicative on how the first process has been performed; a memory unit (220) to temporarily store the first data and an instruction (131) indicative on how the second process is to be performed; a processor unit (230) to qualify the instruction in respect to the first data and to provide second data (122) that determines the second process; and a transmitter unit (240) to output the second data to the second station before the second station applies the second process. <IMAGE>