Process for producing semiconductor substrate,申请号EP19960305134-传众专利搜索

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发明名称	Process for producing semiconductor substrate
摘要
申请公布号	EP0753886(B1)	申请公布日期	2002.03.06
申请号	EP19960305134	申请日期	1996.07.12
申请人	CANON KABUSHIKI KAISHA	发明人	YAMAGATA, KENJI;YONEHARA, TAKAO;SATO, NOBUHIKO;SAKAGUCHI, KIYOFUMI
分类号	H01L21/306;H01L21/762;(IPC1-7):H01L21/306;H01L21/20	主分类号	H01L21/306
代理机构		代理人
主权项
地址

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