Arrangement for data transmission between an equipment for manufacturing of a semiconductor device and a communicating device and method for operating the arrangement

摘要

An arrangement for data transmission comprises an equipment (3) for manufacturing of a semiconductor device in a manufacturing process with an integrated measurement tool (5) for producing measurement data (30) correlating to the manufacturing process. A communicating device (2) performs a data exchange of logistic and process data (20) with the equipment (3) via a bus system (1) by means of a standardized data communication protocol. A measurement application system (6) is connected to the bus system (1) via a bus system hub (4) for sniffing exchanged logistic and process data (20) and to the measurement tool (5) for capturing produced measurement data (30). The measurement application system (6) is applicable for assigning the measurement data (30) to correlating logistic and process data (20). As a result, the measurement application system (6) and measurement tool (5) can easily be integrated into an existing bus system network (1) with one or more manufacturing equipments (3, 11, 12) connected to the network.