发明名称 |
Twin tower wafer boat loading system and method |
摘要 |
An apparatus for automatically and simultaneously loading a single long wafer boat or a plurality of wafer boats onto a cantilever paddle includes a stationary first track aligned with a first opening of a diffusion furnace and a first carriage moveable on the first track. The first carriage supports a cantilever paddle. A first vertical translation mechanism includes a first stationary part and a first vertically moveable support. A second vertical translation mechanism includes a second stationary part and a second vertically moveable support. A first horizontal translation mechanism includes a first base supported by the first vertically moveable support and a first horizontally moveable arm supported by the first base. A second horizontal translation mechanism includes a second base supported by the second vertically moveable support and a second horizontally moveable arm supported by the second base. A horizontal support apparatus is adapted to support the long wafer boat or plurality of wafer boats each loaded with semiconductor wafers. The support apparatus includes a first end supported by the first horizontally moveable arm and a second end supported by the second horizontally moveable arm.
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申请公布号 |
US6352399(B1) |
申请公布日期 |
2002.03.05 |
申请号 |
US19990348997 |
申请日期 |
1999.07.07 |
申请人 |
AMTECH SYSTEMS, INC. |
发明人 |
MARTIN JOHN M.;HARRISON ARTHUR W. |
分类号 |
B65G1/04;H01L21/677;(IPC1-7):B65G25/04 |
主分类号 |
B65G1/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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