| 摘要 |
PROBLEM TO BE SOLVED: To improve the heat resistance of a suction device, and to prevent any dent from being formed on work. SOLUTION: A suction piece 12 is formed of rubber containing no double bond such as silicone rubber and a fluorine rubber, and has a suction surface 13 in contact with the work. The suction piece 12 is vertically moved by an air cylinder 10 and moved in the horizontal direction by a horizontally driving member. A vacuum source 17 is communicated with a vacuum suction port 14 opened in the suction surface 13 and formed in the suction piece 12, the negative pressure air is fed to the vacuum suction port 14, and the suction piece 12 can suck and carry the work. An amorphous carbon film is formed on the suction surface 13, and this film can be generated by the CVD method. Additives in the suction piece 12 can be prevented from being stuck to the work during the suction by the film.
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