发明名称 Method and apparatus for cleaning a tip of a probe of a probe-based measuring instrument
摘要 A high degree of measurement reproducibility is assured for the life of the tip of a probe-based instrument such as an atomic force microscope (AFM) by periodically operating the instrument in a tip cleaning mode to remove contaminants from the tip. The instrument is operated to interrupt the scanning operation and cause the probe to interact with the cleaning medium so as to remove contaminants from at least the pointed end portion of the tip. Tip cleaning may be achieved, for example, by ramming the tip vertically into the sample itself or into another cleaning medium located adjacent the sample. Alternatively, the tip can be moved laterally over the sample, a sticky material, a brush-like material, a ribbed material, or another material having surface characteristics that remove contaminants from the tip.
申请公布号 US6353221(B1) 申请公布日期 2002.03.05
申请号 US19990240713 申请日期 1999.01.29
申请人 VEECO INSTRUMENTS INC. 发明人 ELINGS JEFFREY R.
分类号 G01Q60/24;G01Q70/00;(IPC1-7):G01N13/16 主分类号 G01Q60/24
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