| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cleaning method for a coater whereby a trouble that when a new coating liquid is supplied after the cleaning of the coater, the coating liquid is diluted by a remaining liquid detergent is prevented. SOLUTION: The inside of a pipeline, etc., are cleaned by opening, closing, or opening and closing valves, a first valve V1 to a fourth valve V4, installed in a supply pipeline 1 for supplying a coating liquid to a coating nozzle N, in an air discharge pipeline 2 for discharging air from the coating nozzle, and in a pump-air discharge pipeline 3.</p> |
