| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas separation filter having heat resistance, high strength and high separation characteristics. SOLUTION: A carbonaceous gas separation film 3, which permeates only specific gas and contains 70 wt.% or more of carbon, is formed on the surface of a ceramic porous support 2 and an intermediate layer 4 comprising a ceramic with a mean pore size of 1-10 nm is formed between the ceramic porous support 2 and the carbonaceous gas separation film 3 to manufacture the gas separation filter 1.
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