发明名称 VERTICAL POLISHING METHOD AND VERTICAL POLISHING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a vertical polishing method and its device capable of polishing the two surfaces of a work in a state that a work is vertically erected without changing a position. SOLUTION: A member to be polished has one surface being polished through rotation and/or vibration of a polishing member without conversion into horizontal but in a vertically conveyed state. Thereafter, the member to be polished has the other surface continuously polished without changing a direction. Further, after the member to be polished is conveyed in a vertical state after completion of polishing, after-processing is effected. Since all of conveyance- polishing-conveyance-after-treatment-conveyance are effected in a vertical state, a need for a robot arm is eliminated, and an oxidation film, rust, and burrs of a hole can be rapidly polished at a low cost.
申请公布号 JP2002066886(A) 申请公布日期 2002.03.05
申请号 JP20000260523 申请日期 2000.08.30
申请人 UCHIUMI KAZUNORI 发明人 UCHIUMI KAZUNORI
分类号 B08B1/02;B08B1/04;B24B1/04;B24B7/06;B24B41/047;B24B41/06;H01L21/304;(IPC1-7):B24B7/06 主分类号 B08B1/02
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