| 发明名称 |
Complexes having tris(pyrazolyl)borate ligands for forming films |
| 摘要 |
Methods of forming a film on a substrate using chemical vapor deposition techniques and pyrazolyl complexes. The complexes and methods are particularly suitable for the preparation of semiconductor structures.
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| 申请公布号 |
US6352580(B1) |
申请公布日期 |
2002.03.05 |
| 申请号 |
US20000631498 |
申请日期 |
2000.08.03 |
| 申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
UHLENBROCK STEFAN;VAARTSTRA BRIAN A. |
| 分类号 |
H01L21/314;H01L21/316;(IPC1-7):C23C16/06;C07D231/00 |
主分类号 |
H01L21/314 |
| 代理机构 |
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| 主权项 |
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