发明名称 Junction isolation
摘要 In a bulk silicon process, an insulating layer is placed under the portion of the source and drain used for contacts, thereby reducing junction capacitance. The processing involves a smaller than usual transistor area that is not large enough to hold the contacts, which are placed in an aperture cut into the shallow trench isolation.
申请公布号 US6352903(B1) 申请公布日期 2002.03.05
申请号 US20000605730 申请日期 2000.06.28
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 ROVEDO NIVO;COLAVITO DAVID B.
分类号 H01L21/762;H01L21/8234;H01L29/417;(IPC1-7):H01L21/20 主分类号 H01L21/762
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