发明名称 |
Polishing apparatus with slurry screening |
摘要 |
A polishing apparatus and a polishing method can effectively prevent large diameter particles from being fed with slurry to an object to be polished. A large-diameter particle screener blocks or disperses large diameter particles from entering the slurry. Then, slurry free from large diameter particles is taken up from a slurry container by an intake pipe and fed to the object to be polished.
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申请公布号 |
US6352469(B1) |
申请公布日期 |
2002.03.05 |
申请号 |
US19990433067 |
申请日期 |
1999.11.03 |
申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
MIYAZAKI KYOICHI;NISHIMURA MATSUOMI;TAKAHASHI KAZUO |
分类号 |
B24B37/00;B24B37/04;B24B57/02;C09K3/14;H01L21/304;(IPC1-7):B24B7/00 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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