APPARATUS FOR CONDITIONING POLISHING PAD NOT USING AIR

摘要

PURPOSE: An apparatus for conditioning a polishing pad not using air is provided to purchase expensive equipment for supplying air and to save money for maintaining the expensive equipment, by eliminating the necessity of supplying air to a conditioner bladder. CONSTITUTION: A cylindrical bladder body(44) has a predetermined length, and a cavity is formed inside the cylindrical bladder body. A T-typed fixing member(46) is formed on a side of the outer surface of the bladder body along the length direction of the bladder body. The cylindrical bladder body and the T-typed fixing member are formed as one body in the conditional bladder. A diamond stripper(50) conditions the surface of the polishing pad(54), attached to the bottom of the conditional bladder and in contact with the polishing pad. The T-typed fixing member is inserted into a conditioner arm(40) to hang the conditioner bladder(42) at once. The cylindrical bladder body is made of an elastic material. The section of the bladder body maintains a circle or ellipse type in a normal state. When the conditioner arm applies force to the conditioner bladder to press the conditioner arm towards the polishing pad, the diamond stripper in contact with the polishing pad is stretched by elasticity of the cylindrical bladder body and uniformly presses the surface of the polishing pad while air is not supplied to the inside of the cavity of the cylindrical bladder body.