CLEAN ROOM FOR FABRICATING SEMICONDUCTOR

摘要

PURPOSE: A clean room for fabricating a semiconductor is provided to improve transfer efficiency of a substrate in the clean room, by preparing a transfer unit and a temporary storage unit so that the efficiency of a stocker and an auto guided vehicle is improved. CONSTITUTION: The clean room is divided into a service region(12) and a process region(14) wherein manufacturing apparatuses are positioned in the service region and a process using the manufacturing apparatuses is performed in the process region. A high efficiency particulate air(HEPA) filter(16) supplies purified air to the inside of the clean room, installed on the ceiling of the clean room. The temporary storage unit(32) temporarily stores a substrate excepted from the process before the substrate is transferred to the outside of the clean room, installed in the HEPA filter in the process region. A transfer unit(30) transfers the substrate to the temporary storage unit, installed in the lower portion of the temporary storage unit.