LIGHTING APPARATUS USING PLURALITY OF LIGHT SOURCES, LIGHTING CONTROL DEVICE AND METHOD AND EXPOSURE SYSTEM

摘要

PURPOSE: To provide a lighting apparatus in which luminous flux emitted from each light source is synthesized and lit by using a plurality of the light sources while the quantity of light from each light source is measured with high accu racy. CONSTITUTION: The light apparatus has the first optical system in which a plurality of luminous flux emitted from a plurality of the light sources, the second optical system separating one of a plurality of the luminous flux from luminous flux synthesized by the first optical system, and the first detecting section detecting the quantity of light of one luminous flux separated by the second optical system. According to such a light apparatus, the quantity of light from the corresponding light source can be measured with high accuracy on the basis of the quantity of light of one luminous flux separated by the second optical system.