| 摘要 |
In order to improve the lighting efficiency without incurring the upsizing of the system, a rise in price or the like, a lighting system for surface inspection to be suitably used in pattern inspection or the like of printed boards is provided wherein: a pair of light-emitting members are provided for lighting a given surface region of a subject for inspection obliquely from an upper forward side and an upper rearward side; and a second light-emitting member capable of lighting from just above through a half mirror is added to the pair of light-emitting members to enhance the lighting luminous intensity, each of the pair of light-emitting members including a plurality of LEDs arranged lengthwise and crosswise, and cylindrical lenses disposed correspondingly to respective columns of the LEDs. |
