ROOM PRESSURE CONTROL SYSTEM AND DIFFERENTIAL PRESSURE RETENTION DAMPER

摘要

PROBLEM TO BE SOLVED: To provide a room pressure control system with improved controllability for minimizing the fluctuation of a differential pressure, and a differential pressure retention damper used for the room pressure control system when differential pressure control by adjusting the amount of air supply and exhaust and that by a self-operation differential pressure retention damper are used together. SOLUTION: The self-operation differential pressure retention damper 20 for retaining the differential pressure between a clean room CR and a generation room NR nearly constantly by controlling the amount of surplus air flowing from the high-pressure-side clean room CR to the low-pressure side generation room NR is provided. The differential pressure retention damper 20 controls the speed of an air supply fan 11a mounted to an external conditioner 11 by an inverter 31, thus adjusting the amount of air supply to the clean room CR.