发明名称 Wire bonding apparatus
摘要 In a wire bonding apparatus in which a wire is passed through a capillary that is provided at one end of a bonding arm and a damper that holds the wire is disposed directly above the capillary, the distance between the upper surface of the capillary and the undersurface of the damper is set as a very short distance as 1.5 mm or less.
申请公布号 US2002023942(A1) 申请公布日期 2002.02.28
申请号 US20010934890 申请日期 2001.08.22
申请人 KABUSHIKI KAISHA SHINKAWA 发明人 TERAKADO YOSHIMITSU;MOCHIDA TOORU;MII TATSUNARI;SHIOZAWA SHIGERU
分类号 H01L21/60;B23K20/00;(IPC1-7):B23K31/02;B23K37/00 主分类号 H01L21/60
代理机构 代理人
主权项
地址