发明名称 |
VERFAHREN ZUR SPUTTERBESCHICHTUNG VON OBERFLÄCHEN |
摘要 |
<p>Described is a method for coating surfaces using a facility having sputtering electrodes, which has at least two electrodes that are spaced apart from one another and arranged inside a process chamber, and an inlet for a process gas. The two sputtering electrodes are acted upon by a bipolarly pulsed voltage in such a way that they are alternately operated as cathodes and as anodes. In addition, the frequency of the voltage is set between 1 kHz and 1 MHz. Furthermore, and that the operating parameters are selected in such a way that in operation, the electrodes are at least partially covered by a coating material.</p> |
申请公布号 |
DE59802791(D1) |
申请公布日期 |
2002.02.28 |
申请号 |
DE1998502791 |
申请日期 |
1998.09.15 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
WEBER, THOMAS;VOIGT, JOHANNES;LUCAS, SUSANNE |
分类号 |
C23C14/34;B65D81/05;C23C14/00;C23C16/517;(IPC1-7):B65D81/05 |
主分类号 |
C23C14/34 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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