| 摘要 |
PROBLEM TO BE SOLVED: To miniaturize a vibration-type gyro device. SOLUTION: A vibration-type sensor element 31 is arranged on one from among the surface and the rear of a substrate 30, and a signal processing circuit 32 is arranged on the other. A first sensing wiring pattern 34a and a second sensing wiring pattern 34a which pass a detection signal corresponding to the detection vibration of a vibrating body in the sensor element 31 caused by the Coriolis force are extened and formed in respectively opposite directions from the sensor element 31. A first-kind drive wiring signal 33a and a second- kind drive wiring pattern 33b which pass a first-kind drive signal and a second- kind drive signal which are used to drive and vibrate the vibrating body in the sensor element 31 and whose phases are mutually different by 180 deg. are arranged and formed so as to satisfy a capacitance condition that a capacitance C11 across the wiring patterns 34a, 33a, a capacitance C12 across the wiring patterns 34a, 33b, a capacitance C21 across the wiring patterns 34b, 33a and a capacitance C22 across the wiring patterns 34b, 33b are nearly equal. |
