发明名称 MasK ROM and method for fabricating the same
摘要 Mask ROM and method for fabricating the same, are disclosed, which is operative at a fast speed and a low voltage, including a semiconductor substrate, a first insulating film formed on the semiconductor substrate, conductive layer patterns formed on the first insulating film, a first, and a second impurity regions formed in the semiconductor substrate on both sides of the conductive layer patterns, a second insulating film formed on the first insulating film inclusive of the conductive layer patterns, a contact hole formed in the second insulating film on the conductive layer patterns, a plug formed in each of the contact holes, and wordlines formed the second insulating film inclusive of the plugs.
申请公布号 US2002025611(A1) 申请公布日期 2002.02.28
申请号 US20010929510 申请日期 2001.08.15
申请人 HYUNDAI ELECTRONICS INDUSTRIES CO., LTD. 发明人 LEE KI JIK
分类号 H01L27/10;H01L21/8246;H01L27/112;(IPC1-7):H01L21/82 主分类号 H01L27/10
代理机构 代理人
主权项
地址