发明名称 SEMICONDUCTOR DEVICE HAVING PASSIVE ELEMENTS AND METHOD OF MAKING SAME
摘要 <p>A semiconductor device and a method of making a semiconductor device. A damascene metal layer (16) is formed in an insulating dielectric layer (12), which is in direct electrical communication with a substrate (10). A layer of a passive element, such as first capacitor electrode layer (20) is disposed on metal layer (16) and preferably is offset relative to metal layer (16) to allow a direct electrical interconnect through a via (36) to metal layer (16). In one embodiment a capacitor and a resistor are formed as passive elements in the device. In another embodiment, the passive element includes at least one resistor (28) and optionally a second resistor (32). In yet another embodiment, metal layer (16) is a damascene copper layer.</p>
申请公布号 WO2002017367(A2) 申请公布日期 2002.02.28
申请号 US2001025875 申请日期 2001.08.17
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