摘要 |
<p>A semiconductor device and a method of making a semiconductor device. A damascene metal layer (16) is formed in an insulating dielectric layer (12), which is in direct electrical communication with a substrate (10). A layer of a passive element, such as first capacitor electrode layer (20) is disposed on metal layer (16) and preferably is offset relative to metal layer (16) to allow a direct electrical interconnect through a via (36) to metal layer (16). In one embodiment a capacitor and a resistor are formed as passive elements in the device. In another embodiment, the passive element includes at least one resistor (28) and optionally a second resistor (32). In yet another embodiment, metal layer (16) is a damascene copper layer.</p> |