MANUFACTURING METHOD OF COMPOUND SEMICONDUCTOR FILM AND SOLAR BATTERY

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a thin film of a uniform thickness in a required part alone of a substrate surface at a fast speed in a manufacturing method of a compound semiconductor film for forming a thin film by thermal decomposition of metal organic compound on a substrate. SOLUTION: A compound semiconductor film is manufactured by fixing a substrate on a coating jig consisting of a molding mainly composed of carbon fiber and introducing it to thermal decomposition atmosphere of metal organic compound. A solar battery is constituted by using a compound semiconductor film obtained by the method as a transparent conductive film, an n-type semiconductor layer or a p-type semiconductor layer.