| 摘要 |
PROBLEM TO BE SOLVED: To provide a contact probe which can obtain proper contact properties by suppressing the plastic deformation of a contact pin. SOLUTION: In the contact probe 11, a slit 14 is formed in a tip part 13 of a contact pin 12, and the tip part 13 is divided into a contact part 15 capable of coming into contact with a specimen and a noncontact part 16, while the slit 14 is used as a boundary.
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