Dielectric layer liner for an integrated circuit structure

摘要

An integrated circuit structure (8) includes a plurality of solid state electronic devices and a plurality of conductive elements (12, 14) that electrically couple the electronic devices. The integrated circuit structure (8) also includes a dielectric layer (16) positioned between two or more of the conductive elements (12, 14). A liner (18) is positioned between at least a portion of the dielectric layer (16) and a conductive element (12, 14). The liner (18) is formed from a compound that includes silicon and either carbon and nitrogen.