ILLUMINATION EQUIPMENT AND ALIGNER EQUIPPED THEREWITH

摘要

PROBLEM TO BE SOLVED: To provide a lighting optical device which can substantially reduce the uneven illuminance in the surroundings of a substantial surface light source formed by a wave surface dividing type optical integrator. SOLUTION: The lighting optical device is provided with a light source means (1) which supplies a luminous flux, multiple beam superimposing means (4 and 5) which form an illuminated field in a superimposed state on a prescribed surface based on the luminous flux from each light source, and the wave surface dividing type optical integrator (6) which forms the substantial surface light source composed of many light sources based on the luminous flux from the superimposing means (4 and 5). The plane of incidence of the optical integrator and the prescribed surface are arranged by separating them from each other by a prescribed distance so as to substantially reduce the uneven illuminance in the surroundings of the substantial surface light source.