| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate aligning device where a work load accompanying visual operation is reduced by preventing variation in positioning precision among operators, which occurs when visually aligning with a naked eye or through a microscope. SOLUTION: A probe 3 comprises a reference measuring piece 31 and a plurality of resistance measuring pieces a32-d35, and judges alignment state of a substrate 1 based on an electric resistance value by measuring the electric resistance value of a reference original-point mark 2 provided at the substrate 1. Based on presence of continuity between the reference measuring piece 31 and the resistance measuring pieces a32-d35, moving direction and moving amount of a stage 13 on which the substrate 1 is mounted are controlled by a stage driving/controlling part 11 for correcting position of the substrate 1. |
