CHUCK TOP

摘要

PROBLEM TO BE SOLVED: To lessen the bending of a substrate for display when pins are protruded from a receiving surface. SOLUTION: This chuck top for an inspection apparatus includes a main body which has the receiving surface to receive the substrate for display and the plural pins which are selectively protruded and retreated to and from the receiving surface. The pins include at least the four pins arranged at the four corners of an imaginary rectangular shape and the two pins which are arranged apart a spacing on the virtual line extending between the two opposite sides of the imaginary rectangular shape.