| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a semiconductor inspecting apparatus which enables shortening of testing time of a semiconductor device, having a memory cell array adapted to output a plurality of data in one cycle of a device control signal. SOLUTION: A plurality of deciding sections 1-4 for comparing the output data outputted from a memory cell with expected values thereof are arranged for use to match the number of the data outputted during one cycle of a device control signal. Strobes for indicating judging timings of the judging parts 1-4, judgement validity signals and address signals are generated, to match the number of the deciding sections 1-4 and control the deciding parts 1-4 for comparing individually in each cycle of the device control signal. The results of the decision are sent to a redundancy remedy analysis part 7 in matching with the address of an address selection part 6, to thereby shorten the testing time of the memory cell array of the semiconductor device.</p> |
