发明名称 SEMICONDUCTOR LASER AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor laser and method of manufacturing the same, which can enlarge an ohmic contact area between a nitride-based III-V compound semiconductor layer and an electrode to reduce contact resistance. SOLUTION: Between a p-type clad layer 18 and a p-side contact layer 19, an insulating layer 21, having an opening 21a at a place which corresponds to current injection region of an active layer 16 is formed. The p-type clad layer 18 has a projecting part 18a, which is salient on the p-side contact layer 19 side in correspondence with the opening 21a of the insulating layer 21. The p-side contact layer 19 consists of a basic growth region 19a formed so as to correspond to the projecting part 18a of the p-type clad layer 18, and a regrowth region 19b, which is grown with the basic growth region 19a and projecting part 18a as a base. The width of the p-side contact layer 19 is enlarged by the regrowth region 19b, which increases the ohmic contact area between the p-side contact layer and the p-side electrode 23, and thereby decreases the contact resistance.
申请公布号 JP2002064247(A) 申请公布日期 2002.02.28
申请号 JP20000247661 申请日期 2000.08.17
申请人 SONY CORP 发明人 ANZAI SHINICHI;KIJIMA SATORU;ASANO TAKEHARU;GOTO OSAMU
分类号 H01S5/22;H01S5/323;(IPC1-7):H01S5/22 主分类号 H01S5/22
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