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发明名称
Verfahren und Vorrichtung zum Polieren von Halbleiterscheiben
摘要
申请公布号
DE59802824(D1)
申请公布日期
2002.02.28
申请号
DE19985002824
申请日期
1998.10.08
申请人
WACKER SILTRONIC GESELLSCHAFT FUER HALBLEITERMATERIALIEN AG
发明人
HENNHOEFER, HEINRICH;KRAEMER, HANS;KIRSCHNER, HELMUT;THURNER, MANFRED;BUSCHHARDT, THOMAS;ROETTGER, KLAUS DR.
分类号
B24B37/04;B24B49/14;(IPC1-7):B24B37/04
主分类号
B24B37/04
代理机构
代理人
主权项
地址
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