| 摘要 |
PROBLEM TO BE SOLVED: To provide a sensor of which the functionalities can be tested periodically or continuously, and which is used for a pressure sensor, a flow sensor, an actuator accelerometer or the like. SOLUTION: The sensor is formed from a semiconductor substance. The device is constituted of a support frame, a sensing element and a means which vibrates a detection part at a frequency corresponding substantially to a first resonant frequency mode. An error detection means detects the resonant frequency vibration mode, and it can display the existence of an expected response to the resonant frequency vibration mode with reference to an excitation, on the basis of the output of the error detection means. A means, which detects only the deformation of the sensing element, can provide an output which displays a parameter to be detected. The deformation detection means and the error detection means are formed from the same elements. |
