发明名称 RESIST REMOVING AGENT
摘要 PROBLEM TO BE SOLVED: To provide a resist removing agent containing no hydroxylamines, showing excellent removing property for a resist, and inducing no corrosion in an aluminum alloy or titanium. SOLUTION: The resist removing agent contains a tertiary amine oxide as the essential component is used.
申请公布号 JP2002062669(A) 申请公布日期 2002.02.28
申请号 JP20000255741 申请日期 2000.08.22
申请人 TOSOH CORP 发明人 HARA YASUSHI
分类号 G03F7/42;H01L21/027;H01L21/306;(IPC1-7):G03F7/42 主分类号 G03F7/42
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