DEVICE AND METHOD FOR IMAGE RECOGNITION

摘要

PROBLEM TO BE SOLVED: To provide a device and a method for image recognition which make is possible to set a criterion by a proper and easy method. SOLUTION: This is an image recognizing method for judging the status of a chip by picking up and recognizing an image of the chip on a wafer sheet, and when a match rate as the criterion used to judge the status of the chip by obtaining a match value by matching the image data obtained by picking up the image of the chip with reference patterns and making a comparison with the match value is set, match values obtained by picking up images of chips are compared with the match rate to display temporary decision results and the images of the chips, correction input for matching the temporary judging results with the correct judgement result based upon the images is carried out, and a match rate having consistency to judgement logic deriving the correct judgement result from the match values is computed.