发明名称 |
METHOD FOR MANUFACTURING LIGHT EMITTING DEVICE |
摘要 |
PROBLEM TO BE SOLVED: To provide a light emitting device of low cost wherein improvement of yield of manufacturing processes and shortening a manufacturing term are realized by reducing photolithography processes concerning the manufacturing a transistor, and to provide an electric apparatus using the light emitting device. SOLUTION: A gate electrode 115 which is arranged above a semiconductor film 101 formed on insulator 100 is formed of conducting films 110, 114 constituted of plural layers. By using difference (selectivity at the time of etching) of the respective etching rates of the plural layers, the impurity concentration of impurity regions (especially, LDD regions 111, 112) formed in the semiconductor film 101 is controlled.
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申请公布号 |
JP2002064207(A) |
申请公布日期 |
2002.02.28 |
申请号 |
JP20010169074 |
申请日期 |
2001.06.05 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
YAMAZAKI SHUNPEI;SUZAWA HIDEOMI;ONO KOJI;TAKAYAMA TORU |
分类号 |
H01L21/28;G09F9/30;H01L21/336;H01L21/8234;H01L21/8238;H01L27/08;H01L27/088;H01L27/092;H01L27/32;H01L29/423;H01L29/43;H01L29/49;H01L29/786;(IPC1-7):H01L29/786;H01L21/823 |
主分类号 |
H01L21/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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