摘要 |
PROBLEM TO BE SOLVED: To solve the conventional problem that in the case of a target manufactured by mixing Sm powder and Co powder each prepared according to the desired composition and sintering the resultant powder mixture in vacuum, an Sm metal phase is formed in the structure of the target and causes nonuniformity of the target structure and results in the occurrence of variability and defects in a recording medium owing to film-composition nonuniformity, etc., and also, in the case of a target manufactured by preparing powder of the desired composition and sintering and solidifying the powder in this state, the target is extremely brittle and easily broken because the structure of the target is composed mainly of intermetallic compound phase and, as a result, it is difficult to stably manufacture a large-size product. SOLUTION: An Sm-Co target material composed essentially of a compound of Sm and Co and having a structure in which at least two phases of A phase having >=50 mole % Sm content and B phase having Co content higher than that of the A phase are dispersedly joined can be provided.
|