发明名称 Method of monitoring manufacturing apparatus
摘要 When the operation of any of manufacturing apparatus is halted, influence exerted by the operation halt on the manufacturing state of each of products is evaluated based on the difference between the number of products in a processing waiting state in the manufacturing apparatus at a time at which the operation of the manufacturing apparatus is halted or at a time antecedent thereto and the number of products in the processing waiting state in the manufacturing apparatus at a time at which the manufacturing apparatus is reoperated after the operation thereof is halted or at a time posterior thereto or on the difference between the period during which the product processed by the manufacturing apparatus during a given period antecedent to the time at which the operation of the manufacturing apparatus is halted is in the processing waiting state in the manufacturing apparatus and the period during which the product processed by the manufacturing apparatus during the given period posterior to the time at which the manufacturing apparatus is reoperated after the operation thereof is halted is in the processing waiting state in the manufacturing apparatus.
申请公布号 US2002026263(A1) 申请公布日期 2002.02.28
申请号 US20010809085 申请日期 2001.03.16
申请人 MATSUMOTO SHIGERU 发明人 MATSUMOTO SHIGERU
分类号 G05B19/418;G05B23/02;G06Q50/00;G06Q50/04;H01L21/02;(IPC1-7):G06F19/00 主分类号 G05B19/418
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