| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an optimum condition deciding method, being reasonable and of high possibility, of simulation parameter for improved precision in a semiconductor device simulation, and to provide an optimum condition assisting device for deciding an optimum condition for the simulation parameter. SOLUTION: A large amount of simulation parameters modeling a physical phenomenon inside a semiconductor, related to a semiconductor devise simulation are taken as adjustment/control items (control factor and level), and statistical process is performed about the information data for the control factor. Thus an SN ratio and a level-specific SN ratio average value, as well as a sensitivity and a level-specific sensitivity average value are acquired, and a level at which the level-specific SN ratio average value is maximum is examined for each control factor, with the control factor and such control factor of combination of levels being an optimum condition of the simulation parameter.</p> |
