| 发明名称 |
Spectral ellipsometer having a refractive illuminating optical system |
| 摘要 |
The invention concerns a spectral ellipsometer having a refractive illuminating optical system (3) that is equipped with a small illuminating aperture and is designed for a wide wavelength region. By color correction of the illuminating optical system (3), a very small measurement spot (6) is generated on a specimen surface (4).
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| 申请公布号 |
US2002024669(A1) |
申请公布日期 |
2002.02.28 |
| 申请号 |
US20010893709 |
申请日期 |
2001.06.29 |
| 申请人 |
DANNER LAMBERT;WIENECKE JOACHIM |
发明人 |
DANNER LAMBERT;WIENECKE JOACHIM |
| 分类号 |
G01J4/04;G01N21/21;G02B13/00;G02B13/14;(IPC1-7):G01J4/00 |
主分类号 |
G01J4/04 |
| 代理机构 |
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