| 摘要 |
The invention concerns a method and an apparatus for phase correction of position and detection signals in scanning microscopy. The method comprises the following steps: generation of a position signal from the position of a beam deflection device (7) and generation, from the light (17) proceeding from the specimen (15), of a detection signal pertinent to the position signal. The position signal and detection signal are then transferred to a processing unit (23). In the processing unit (23), a correction value is determined. The correction value is transferred to a computer (34) to compensate for time differences between the position signal and detection signal.
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