发明名称 |
Diffraction grating and uses of a diffraction grating |
摘要 |
A diffraction grating (1) has a multiplicity of parallel diffraction structures succeeding one another periodically. The latter are arranged on a support (2) and each incorporate a slat (3) extending from a base area (4) of the support (2). Said slat has a substantially rectangular cross-section. The width w of the slat (3) comes to less than 100 nm, preferably between 20 nm and 60 nm, more preferably in the area of 50 nm. Advantageous uses of the diffraction grating (1) are obtained e.g. in a Littrow configuration, preferably in third order of the incident light beams (8), in particular at a light wavelength that is less than 250 nm.
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申请公布号 |
US2002024735(A1) |
申请公布日期 |
2002.02.28 |
申请号 |
US20010863745 |
申请日期 |
2001.05.23 |
申请人 |
KLEEMANN BERND;HEIDEMANN KLAUS |
发明人 |
KLEEMANN BERND;HEIDEMANN KLAUS |
分类号 |
G02B5/18;(IPC1-7):G02B5/18 |
主分类号 |
G02B5/18 |
代理机构 |
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地址 |
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