METHOD FOR FORMING ALIGNMENT LAYER

摘要

PROBLEM TO BE SOLVED: To provide a method for forming an alignment layer on a substrate. SOLUTION: The film is adhered and aligned in a single step with a method containing a step to shoot an ion-beam at the substrate with a specified incident angle and simultaneously to adhere the film to the substrate (a) and to align an atomic structure of the film in at least a specified aligning direction (b).