STRONG PERMEABLE CHEMICAL LIQUID HEATING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a heating apparatus which is excellent in durability to a strong permeable chemical liquid. SOLUTION: The strong permeable chemical liquid heating apparatus includes a cover member 11, a chemical liquid circulating piping 12 arranged in a space in the cover member, and a heater 22 arranged on an outer peripheral surface of the piping 12. The cover member 11 is formed therein with a gas inlet port 17 and an outlet port 18. A strong permeable chemical liquid circulated through the piping 12 is passed through the piping 12 in the form of a permeable gas. The permeable gas is carried out by an air flow within the cover member 11 faster than re-liquefaction in the heater 22 and discharged from the discharge port 18.