发明名称 |
OXIME SULFONATE AND N-OXYIMIDOSULFONATE PHOTOACID GENERATORS AND PHOTORESISTS COMPRISING SAME |
摘要 |
New photoacid generator compounds ("PAGs") are provided and photoresist compositions that comprise such compounds. In particular, non-ionic PAGs are provided that contain an oxime sulfonate group, and/or an N-oxyimidosulfonate group. PAGs of the invention are particularly useful as photoactive components of photoresists imaged at short wavelenghts such as 248 nm, 193 nm and 157 nm. |
申请公布号 |
WO0217019(A2) |
申请公布日期 |
2002.02.28 |
申请号 |
WO2001US26526 |
申请日期 |
2001.08.24 |
申请人 |
SHIPLEY COMPANY, L.L.C. |
发明人 |
CAMERON, JAMES, F.;POHLERS, GERHARD |
分类号 |
C07D487/04;C09K3/00;G03F7/004;G03F7/039;H01L21/027 |
主分类号 |
C07D487/04 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|