发明名称 |
Semiconductor processing module and apparatus |
摘要 |
<p>A compact single-wafer-processing semiconductor-manufacturing apparatus for processing semiconductor substrates is characterized in that at least two units, each of which comprises a reactor for growing a film on a semiconductor substrate and a load lock chamber for having the semiconductor substrate wait in a vacuum and which is directly connected with the reactor via a gate valve, are modularized and these modularized reactor units can be configured as a cluster through an atmospheric front end (AFE). Inside the load lock chamber, a substrate transfer mechanism comprising a thin link arm for transferring a semiconductor substrate into the reactor is provided.</p> |
申请公布号 |
EP1182695(A2) |
申请公布日期 |
2002.02.27 |
申请号 |
EP20010307107 |
申请日期 |
2001.08.21 |
申请人 |
ASM JAPAN K.K. |
发明人 |
YAMAGISHI, TAKAYUKI;SUWADA, MASAEI;WATANABE, TAKESHI |
分类号 |
H01L21/687;B65G49/07;H01L21/00;C23C14/56;H01L21/02;H01L21/205;H01L21/677;(IPC1-7):H01L21/00 |
主分类号 |
H01L21/687 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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